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Reliability of ultra-thin dielectrics for giga scale silicon technologies

dc.contributor.authorMaes, Herman
dc.contributor.authorDegraeve, Robin
dc.contributor.authorNigam, Tanya
dc.contributor.authorDe Blauwe, Jan
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-01T08:29:24Z
dc.date.available2021-10-01T08:29:24Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2746
dc.sourceIIOimport
dc.titleReliability of ultra-thin dielectrics for giga scale silicon technologies
dc.typeOral presentation
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorGroeseneken, Guido
dc.source.peerreviewno
dc.source.conferenceCOMMAD 98; 14-16 December 1998; Perth, Australia.
dc.source.conferencelocation
imec.availabilityPublished - imec


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