Salicides for 0.18 µm and below
| dc.contributor.author | Maex, Karen | |
| dc.date.accessioned | 2021-10-01T08:29:28Z | |
| dc.date.available | 2021-10-01T08:29:28Z | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2748 | |
| dc.source | IIOimport | |
| dc.title | Salicides for 0.18 µm and below | |
| dc.type | Proceedings paper | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 69 | |
| dc.source.conference | Proceedings of the 28th European Solid-State Device Research Conference - ESSDERC'98; 8-10 Sept. 1998; Bordeaux, France. | |
| dc.source.conferencelocation | ||
| imec.availability | Published - imec |
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