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The development of an EUVL pellicle comprising carbon nanomaterials

dc.contributor.authorVanpaemel, Johannes
dc.contributor.authorLee, Jae Uk
dc.contributor.authorKrishnaraj, Chidharth
dc.contributor.authorPollentier, Ivan
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorGallagher, Emily
dc.date.accessioned2021-10-23T16:24:27Z
dc.date.available2021-10-23T16:24:27Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27499
dc.sourceIIOimport
dc.titleThe development of an EUVL pellicle comprising carbon nanomaterials
dc.typeMeeting abstract
dc.contributor.imecauthorLee, Jae Uk
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorGallagher, Emily
dc.contributor.orcidimecLee, Jae Uk::0000-0002-9434-5055
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage165
dc.source.endpage166
dc.source.conferenceMaterials for Advanced Metallization Conference - MAM
dc.source.conferencedate20/03/2016
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - open access
imec.internalnotespaper PND-07


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