dc.contributor.author | Vanstreels, Kris | |
dc.contributor.author | Zahedmanesh, Houman | |
dc.contributor.author | Verdonck, Patrick | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.date.accessioned | 2021-10-23T16:24:53Z | |
dc.date.available | 2021-10-23T16:24:53Z | |
dc.date.issued | 2016 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27500 | |
dc.source | IIOimport | |
dc.title | Determination of thermal expansion coefficients of low- dielectrics by cube corner indentation tests at elevated temperatures | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Vanstreels, Kris | |
dc.contributor.imecauthor | Zahedmanesh, Houman | |
dc.contributor.imecauthor | Verdonck, Patrick | |
dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
dc.contributor.orcidimec | Zahedmanesh, Houman::0000-0002-0290-691X | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | Nanobrücken: A Nanomechanical Testing Workshop & Hysitron User Meeting | |
dc.source.conferencedate | 2/03/2016 | |
dc.source.conferencelocation | Saarbrücken Germany | |
imec.availability | Published - imec | |