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Determination of thermal expansion coefficients of low-k dielectrics by cube corner indentation tests at elevated temperatures

dc.contributor.authorVanstreels, Kris
dc.contributor.authorZahedmanesh, Houman
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorHangen, Ude
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-23T16:25:22Z
dc.date.available2021-10-23T16:25:22Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27501
dc.sourceIIOimport
dc.titleDetermination of thermal expansion coefficients of low-k dielectrics by cube corner indentation tests at elevated temperatures
dc.typeMeeting abstract
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorZahedmanesh, Houman
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.source.peerreviewyes
dc.source.beginpage61
dc.source.endpage62
dc.source.conferenceMaterials for Advanced Metallization Conference - MAM
dc.source.conferencedate20/03/2016
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - imec
imec.internalnotesCR1


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