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Vertical nanowire FET integration and device aspects

dc.contributor.authorVeloso, Anabela
dc.date.accessioned2021-10-23T16:29:13Z
dc.date.available2021-10-23T16:29:13Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27509
dc.sourceIIOimport
dc.titleVertical nanowire FET integration and device aspects
dc.typeMeeting abstract
dc.contributor.imecauthorVeloso, Anabela
dc.source.peerreviewyes
dc.source.beginpage1167
dc.source.conferenceSilicon Compatible Materials, Processes and Technologies for Advanced Integrated Circuits and Emerging Applications 6
dc.source.conferencedate29/05/2016
dc.source.conferencelocationSan Diego, CA USA
dc.identifier.urlhttp://ma.ecsdl.org/content/MA2016-01/23/1167.short
imec.availabilityPublished - imec
imec.internalnotesECS Meeting Abstracts; Vol. MA 2016-01


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