Authors

Veloso, Anabela; Cho, Moon Ju; Simoen, Eddy; Hellings, Geert; Matagne, Philippe; Collaert, Nadine; Thean, Aaron

Conference

229th ECS Meeting Conference D01: International Symposium on Dielectrics for Nanosystems 7

Title

Gate-all-around nanowire FETs vs. triple-gate FinFETs: on gate integrity and device characteristics

Publication type

Meeting abstract