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Scaling of Back End of Line Processing : opportunities and challenges

dc.contributor.authorVerdonck, Patrick
dc.contributor.authorWilson, Chris
dc.contributor.authorRonse, Kurt
dc.contributor.authorWen, Liang Gong
dc.contributor.authorArmini, Silvia
dc.date.accessioned2021-10-23T16:36:14Z
dc.date.available2021-10-23T16:36:14Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27521
dc.sourceIIOimport
dc.titleScaling of Back End of Line Processing : opportunities and challenges
dc.typeMeeting abstract
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorRonse, Kurt
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewyes
dc.source.conferenceSEMINATEC
dc.source.conferencedate14/04/2016
dc.source.conferencelocationCampinas Brazil
dc.identifier.urlhttp://www.ccs.unicamp.br/seminatec/wp-content/uploads/2016/02/BEOLscalingabstractVs4_Verdonck.pdf
imec.availabilityPublished - imec


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