Influence of CO2 gas atmosphere on the liquid filling of superhydrophobic nanostructures

Thumbnail
Metadata
Show full item record
Authors
Vereecke, Guy; Debruyn, Haroen; Xu, XiuMei; Holsteyns, Frank; De Gendt, Stefan
Conference
Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS
Title
Influence of CO2 gas atmosphere on the liquid filling of superhydrophobic nanostructures
Publication type
Proceedings paper
Collections