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Non-linearity of the dissolution behaviour in Extreme UV photoresists

dc.contributor.authorVesters, Yannick
dc.contributor.authorDe Simone, Danilo
dc.date.accessioned2021-10-23T16:51:08Z
dc.date.available2021-10-23T16:51:08Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27549
dc.sourceIIOimport
dc.titleNon-linearity of the dissolution behaviour in Extreme UV photoresists
dc.typeOral presentation
dc.contributor.imecauthorDe Simone, Danilo
dc.contributor.orcidimecDe Simone, Danilo::0000-0003-3927-5207
dc.source.peerreviewno
dc.source.conferenceChemical Research in Flanders Symposium
dc.source.conferencedate24/10/2016
dc.source.conferencelocationBlankenberghe Belgium
dc.contributor.thesisadvisorDe Gendt, Stefan
imec.availabilityPublished - imec


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