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In Depth Understanding of Low-k Dielectric Reliability in Interconnect Systems

dc.contributor.authorWu, Chen
dc.date.accessioned2021-10-23T17:16:51Z
dc.date.available2021-10-23T17:16:51Z
dc.date.issued2016-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27599
dc.sourceIIOimport
dc.titleIn Depth Understanding of Low-k Dielectric Reliability in Interconnect Systems
dc.typePHD thesis
dc.contributor.imecauthorWu, Chen
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorDe Wolf, Ingrid
dc.contributor.thesisadvisorGroeseneken, Guido
dc.identifier.urlhttps://limo.libis.be/primo-explore/fulldisplay?docid=LIRIAS1733126&context=L&vid=Lirias&search_scope=Lirias&tab=default_tab&lang=en_US&fromSitemap=1
imec.availabilityPublished - open access


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