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The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass

dc.contributor.authorXue, P.
dc.contributor.authorPei, D.
dc.contributor.authorZheng, H.
dc.contributor.authorLi, W.
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorLin, Y.-H.
dc.contributor.authorFung, H.-S.
dc.contributor.authorChen, C.-C.
dc.contributor.authorNishi, Y.
dc.contributor.authorShohet, J.L.
dc.date.accessioned2021-10-23T17:27:24Z
dc.date.available2021-10-23T17:27:24Z
dc.date.issued2016
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27620
dc.sourceIIOimport
dc.titleThe effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass
dc.typeJournal article
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.source.peerreviewyes
dc.source.beginpage23
dc.source.endpage26
dc.source.journalThin Solid Films
dc.source.volume616
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0040609016304217
imec.availabilityPublished - imec


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