High-throughput magnetic metrology for spintronic CMOS integration

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Authors
Yan, Jingdong; Manfrini, Mauricio; Radisic, Dunja; Ciubotaru, Florin; Wilson, Chris; Radu, Iuliana; Thean, Aaron
Conference
Materials for Advanced Metallization Conference - MAM
Title
High-throughput magnetic metrology for spintronic CMOS integration
Publication type
Meeting abstract
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