Show simple item record

Mechanically conscious design of airgaps in nano-interconnects

dc.contributor.authorZahedmanesh, Houman
dc.contributor.authorGonzalez, Mario
dc.contributor.authorCiofi, Ivan
dc.contributor.authorCroes, Kristof
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-23T17:42:59Z
dc.date.available2021-10-23T17:42:59Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27648
dc.sourceIIOimport
dc.titleMechanically conscious design of airgaps in nano-interconnects
dc.typeMeeting abstract
dc.contributor.imecauthorZahedmanesh, Houman
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage65
dc.source.endpage66
dc.source.conferenceMaterials for Advanced Metalization - MAM
dc.source.conferencedate20/03/2016
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - open access
imec.internalnotesPaper CR3


Files in this item

Thumbnail
Name:
33051.pdf
Size:
730.6Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record