Integration of porous low-k dielectrics using post porosity pore protection

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Authors

Zhang, Liping; de Marneffe, Jean-Francois; Verdonck, Patrick; Heylen, Nancy; Wen, Liang Gong; Wilson, Chris; Tokei, Zsolt; Boemmels, Juergen; De Gendt, Stefan; Baklanov, Mikhail

ISSN

0022-3727

Issue

50

Journal

Journal of Physics D: Applied Physics

Volume

49

Title

Integration of porous low-k dielectrics using post porosity pore protection

Publication type

Journal article

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