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Ultra-compact silicon nitride grating coupler for microscopy system
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Authors
Zhu, Yunpeng
;
Jiao, Y.
;
Wang, J.
;
Xie, Weiqiang
;
Bin, Tian
;
Van Thourhout, Dries
Conference
Proceedings of the 20th Annual Symposium of the IEEE Photonics Society Benelux Chapter
Title
Ultra-compact silicon nitride grating coupler for microscopy system
Publication type
Proceedings paper
Embargo date
9999-12-31
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