Benchmarking of monolithic 3D integrated MX2 FETs with Si FinFETs

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Authors
Agarwal Kumar, Tarun; Szabo, Aron; Garcia Bardon, Marie; Soree, Bart; Radu, Iuliana; Raghavan, Praveen; Luisier, Mathieu; Dehaene, Wim; Heyns, Marc
Conference
IEEE International Electron Devices Meeting - IEDM
Title
Benchmarking of monolithic 3D integrated MX2 FETs with Si FinFETs
Publication type
Proceedings paper
Embargo date
9999-12-31
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