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Assessment of light source bandwidth impacts on image contrast enhancement using process window discovery

dc.contributor.authorAlagna, Paolo
dc.contributor.authorRechtsteiner, G.
dc.contributor.authorConley, W.
dc.contributor.authorCross, A.
dc.contributor.authorSah, K.
dc.contributor.authorHalder, Sandip
dc.date.accessioned2021-10-24T02:51:42Z
dc.date.available2021-10-24T02:51:42Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27732
dc.sourceIIOimport
dc.titleAssessment of light source bandwidth impacts on image contrast enhancement using process window discovery
dc.typeProceedings paper
dc.contributor.imecauthorAlagna, Paolo
dc.contributor.imecauthorHalder, Sandip
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage101471X
dc.source.conferenceOptical Microlithography XXX
dc.source.conferencedate25/02/2017
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttps://doi.org/10.1117/12.2260314
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 10147


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