Publication:

3D Localization of liner breakdown within Cu filled TSV?s by backside LIT and PEM defocusing series

Date

2017

Proceedings Paper

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Author(s)

;

Grosse, Christian

;

De Wolf, Ingrid

;

Brand, Sebastian

Statistics

1971 since deposited on 2021-10-24

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Acq. date: 2026-10-05