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Applications of smart monomolecular films in IC microelectronics for organic-inorganic interface engineering
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Authors
Armini, Silvia
;
Herregods, Sebastiaan
;
Lecordier, Laurent
;
Verheyen, Claudia
;
Delande, Tinne
;
Demeurisse, Caroline
;
Spampinato, Valentina
;
Tokei, Zsolt
;
Struyf, Herbert
Conference
43rd International Conference on Micro and Nanoengineering - MNE
Title
Applications of smart monomolecular films in IC microelectronics for organic-inorganic interface engineering
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