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Sheet-resistance measurements in nanometer-wide conductive lines
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Authors
Bogdanowicz, Janusz
;
Folkersma, Steven
;
Sergeant, Stefanie
;
Schulze, Andreas
;
Paredis, Kristof
;
Celano, Umberto
;
Kunert, Bernardette
;
Guo, Weiming
;
Mols, Yves
;
Petersen, Dirch
;
Witthoft, Maria-Louise
;
Hansen, Ole
;
Henrichsen, Henrik
;
Nielsen, Pieter
;
Vandervorst, Wilfried
Conference
EMRS Spring Meeting Symposium S: Analytical Techniques for Precise Characterization of Nano Materials - ALTECH
Title
Sheet-resistance measurements in nanometer-wide conductive lines
Publication type
Meeting abstract
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