Modeling of via resistance for advanced technology nodes

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Authors

Ciofi, Ivan; Roussel, Philippe; Saad, Yves; Moroz, Victor; Hu, Jojo; Baert, Rogier; Croes, Kristof; Contino, Antonino; Vandersmissen, Kevin; Gao, Weimin; Matagne, Philippe; Badaroglu, Mustafa; Wilson, Chris; Mocuta, Dan; Tokei, Zsolt

ISSN

0018-9383

Issue

5

Journal

IEEE Transactions on Electron Devices

Volume

64

Title

Modeling of via resistance for advanced technology nodes

Publication type

Journal article

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