Modeling of via resistance for advanced technology nodes

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Author(s)

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Roussel, Philippe

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Contino, Antonino

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Vandersmissen, Kevin

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Matagne, Philippe

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Badaroglu, Mustafa

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Journal

IEEE Transactions on Electron Devices

Metrics

1991 since deposited on 2021-10-24

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Acq. date: 2025-10-24