Computational nanometrology of line edge roughness: recent challenges and advances
dc.contributor.author | Constantoudis, Vassilios | |
dc.contributor.author | Papavieros, George | |
dc.contributor.author | Lorusso, Gian | |
dc.contributor.author | Gogolides, Evangelos | |
dc.date.accessioned | 2021-10-24T03:34:37Z | |
dc.date.available | 2021-10-24T03:34:37Z | |
dc.date.issued | 2017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/28060 | |
dc.source | IIOimport | |
dc.title | Computational nanometrology of line edge roughness: recent challenges and advances | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Lorusso, Gian | |
dc.source.peerreview | no | |
dc.source.conference | 43rd International Conference on Micro and Nanoengineering - MNE | |
dc.source.conferencedate | 18/09/2017 | |
dc.source.conferencelocation | Braga Portugal | |
dc.identifier.url | http://mne2017.org/wp-content/uploads/2017/10/Booklet_MNE_FINAL_WEB.pdf | |
imec.availability | Published - imec | |
imec.internalnotes | PO049 |
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