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Computational nanometrology of line edge roughness: recent challenges and advances

dc.contributor.authorConstantoudis, Vassilios
dc.contributor.authorPapavieros, George
dc.contributor.authorLorusso, Gian
dc.contributor.authorGogolides, Evangelos
dc.date.accessioned2021-10-24T03:34:48Z
dc.date.available2021-10-24T03:34:48Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28061
dc.sourceIIOimport
dc.titleComputational nanometrology of line edge roughness: recent challenges and advances
dc.typeProceedings paper
dc.contributor.imecauthorLorusso, Gian
dc.source.peerreviewno
dc.source.conferenceEMLC2017
dc.source.conferencedate27/06/2017
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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