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Influence of Boron diffusion on reliability of ultra-thin oxides
Publication:
Influence of Boron diffusion on reliability of ultra-thin oxides
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Date
1998
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Nigam, Tanya
;
Degraeve, Robin
;
Heyns, Marc
;
Groeseneken, Guido
;
Maes, Herman
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1939
since deposited on 2021-10-01
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last month
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last week
Acq. date: 2026-01-07
Citations
Metrics
Views
1939
since deposited on 2021-10-01
1
last month
1
last week
Acq. date: 2026-01-07
Citations