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Control of texture and crystallization in sol-gel PZT ferroelectric capacitors with reactively sputtered RuO2 electrode layers

dc.contributor.authorNorga, Gerd
dc.contributor.authorWouters, D. J.
dc.contributor.authorFè, Laura
dc.contributor.authorBartic, Andrei
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-10-01T08:34:14Z
dc.date.available2021-10-01T08:34:14Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2811
dc.sourceIIOimport
dc.titleControl of texture and crystallization in sol-gel PZT ferroelectric capacitors with reactively sputtered RuO2 electrode layers
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceMRS Fall Meeting; 30 Nov. - 4 Dec. 1998; Boston, MA, USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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