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3D stacking cobalt and nickel microbumps and kinetics of corresponding IMCs at low temperatures
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Authors
De Preter, Inge
;
Derakhshandeh, Jaber
;
Nagano, Fuya
;
Houshmand Sharifi, Shamin
;
Hou, Lin
;
Bex, Pieter
;
Suhard, Samuel
;
Shibata, Toshiaki
;
Yukinori, Oda
;
Hashimoto, Shigeo
;
Lieten, Ruben
;
Rebibis, Kenneth June
;
Miller, Andy
;
Beyer, Gerald
;
Beyne, Eric
Conference
IEEE International Interconnect Technology Conference - IITC
Title
3D stacking cobalt and nickel microbumps and kinetics of corresponding IMCs at low temperatures
Publication type
Proceedings paper
Embargo date
9999-12-31
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