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Ewod system designed for optical switching

dc.contributor.authorDegenhardt, S.
dc.contributor.authorEndrody, C.
dc.contributor.authorSi, S.
dc.contributor.authorWeinberger, S.
dc.contributor.authorClaes, R.
dc.contributor.authorJusto, Y.
dc.contributor.authorD'heer, Herbert
dc.contributor.authorNeft, A.
dc.contributor.authorHoffmann, M.
dc.date.accessioned2021-10-24T04:05:52Z
dc.date.available2021-10-24T04:05:52Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28198
dc.sourceIIOimport
dc.titleEwod system designed for optical switching
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1329
dc.source.endpage1332
dc.source.conference30th International Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate22/01/2017
dc.source.conferencelocationLas Vegas, NV USA
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7863665/
imec.availabilityPublished - open access
imec.internalnotes


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