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Insight in nucleation mechanisms of semiconducting 2D metal sulfides and application to area selective deposition
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Authors
Delabie, Annelies
;
Tomczak, Yoann
;
Heyne, Markus
;
Groven, Benjamin
;
van Pelt, Thomas
;
Zhang, Haodong
;
De Gendt, Stefan
;
Van Elshocht, Sven
;
Caymax, Matty
;
Radu, Iuliana
Conference
2nd Area Selective Deposition Workshop - ASD
Title
Insight in nucleation mechanisms of semiconducting 2D metal sulfides and application to area selective deposition
Publication type
Meeting abstract
Embargo date
9999-12-31
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