Authors

Delabie, Annelies; Zhang, Haodong; van Pelt, Thomas; Groven, Benjamin; Heyne, Markus; Tomczak, Yoann; Caymax, Matty; Radu, Iuliana

Conference

Joint EuroCVD-21 - BalticALD-15 Conference

Title

Nucleation mechanisms for chemical vapor deposition and atomic layer deposition of 2D semiconductor materials

Publication type

Proceedings paper

Embargo date

9999-12-31