Show simple item record

Local arrangement of substitutional C atoms and the thermal stability of epitaxial Si:C(P) grown by CVD

dc.contributor.authorDhayalan, Sathish Kumar
dc.contributor.authorNuytten, Thomas
dc.contributor.authorLoo, Roger
dc.contributor.authorRosseel, Erik
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorShimura, Yosuke
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-24T04:17:03Z
dc.date.available2021-10-24T04:17:03Z
dc.date.issued2017-11
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28241
dc.sourceIIOimport
dc.titleLocal arrangement of substitutional C atoms and the thermal stability of epitaxial Si:C(P) grown by CVD
dc.typeJournal article
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.source.peerreviewyes
dc.source.beginpageP755
dc.source.endpageP759
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue12
dc.source.volume6
dc.identifier.urlhttp://jss.ecsdl.org/content/6/12/P755.full.pdf+html?sid=b512b0ef-afd4-402f-8187-fe20a970c676
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record