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Local arrangement of substitutional C atoms and the thermal stability of epitaxial Si:C(P) grown by CVD
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Authors
Dhayalan, Sathish Kumar
;
Nuytten, Thomas
;
Loo, Roger
;
Rosseel, Erik
;
Hikavyy, Andriy
;
Shimura, Yosuke
;
Vandervorst, Wilfried
ISSN
2162-8769
Issue
12
Journal
ECS Journal of Solid State Science and Technology
Volume
6
Title
Local arrangement of substitutional C atoms and the thermal stability of epitaxial Si:C(P) grown by CVD
Publication type
Journal article
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