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Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium ion battery electrode material

dc.contributor.authorDobbelaere, Thomas
dc.contributor.authorMattelaer, Felix
dc.contributor.authorVereecken, Philippe
dc.contributor.authorDetavernier, Christophe
dc.date.accessioned2021-10-24T04:22:08Z
dc.date.available2021-10-24T04:22:08Z
dc.date.issued2017
dc.identifier.issn0734-2101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28260
dc.sourceIIOimport
dc.titlePlasma-enhanced atomic layer deposition of vanadium phosphate as a lithium ion battery electrode material
dc.typeJournal article
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage41513
dc.source.journalJournal of Vacuum Science and Technology A
dc.source.issue4
dc.source.volume35
dc.identifier.urlhttp://avs.scitation.org/doi/abs/10.1116/1.4987131
imec.availabilityPublished - open access


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