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Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium ion battery electrode material
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Authors
Dobbelaere, Thomas
;
Mattelaer, Felix
;
Vereecken, Philippe
;
Detavernier, Christophe
ISSN
0734-2101
Issue
4
Journal
Journal of Vacuum Science and Technology A
Volume
35
Title
Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium ion battery electrode material
Publication type
Journal article
Embargo date
9999-12-31
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