Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium ion battery electrode material

dc.contributor.author	Dobbelaere, Thomas
dc.contributor.author	Mattelaer, Felix
dc.contributor.author	Vereecken, Philippe
dc.contributor.author	Detavernier, Christophe
dc.contributor.imecauthor	Vereecken, Philippe
dc.contributor.orcidimec	Vereecken, Philippe::0000-0003-4115-0075
dc.date.accessioned	2021-10-24T04:22:08Z
dc.date.available	2021-10-24T04:22:08Z
dc.date.embargo	9999-12-31
dc.date.issued	2017
dc.identifier.issn	0734-2101
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/28260
dc.identifier.url	http://avs.scitation.org/doi/abs/10.1116/1.4987131
dc.source.beginpage	41513
dc.source.issue	4
dc.source.journal	Journal of Vacuum Science and Technology A
dc.source.volume	35
dc.title	Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium ion battery electrode material
dc.type	Journal article
dspace.entity.type	Publication
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