Implementation of Block Copolymer Based Directed Self-assembly for Advanced Lithography

Thumbnail
View/open
Metadata
Show full item record
Authors
Doise, Jan
Supervisor
Groeseneken, Guido; Gronheid, Roel
Title
Implementation of Block Copolymer Based Directed Self-assembly for Advanced Lithography
Publication type
PHD thesis
Embargo date
9999-12-31
Collections