Authors

Doise, Jan; Chan, BT; Hori, Masafumi; Gronheid, Roel

ISSN

1932-5150

Issue

3

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

16

Title

Dual brush process for selective surface modification in graphoepitaxy directed self-assembly

Publication type

Journal article

Embargo date

9999-12-31