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Dual brush process for selective surface modification in graphoepitaxy directed self-assembly

dc.contributor.authorDoise, Jan
dc.contributor.authorChan, BT
dc.contributor.authorHori, Masafumi
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-24T04:23:42Z
dc.date.available2021-10-24T04:23:42Z
dc.date.issued2017
dc.identifier.issn1932-5150
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28266
dc.sourceIIOimport
dc.titleDual brush process for selective surface modification in graphoepitaxy directed self-assembly
dc.typeJournal article
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage33503
dc.source.journalJournal of Micro/Nanolithography MEMS and MOEMS
dc.source.issue3
dc.source.volume16
dc.identifier.urlhttps://www.spiedigitallibrary.org/journals/journal-of-micro-nanolithography-mems-and-moems/volume-16/issue-03/033503/Dual-brush
imec.availabilityPublished - open access


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