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Articles
Characterization and mitigation of 3D mask effects
Publication:
Characterization and mitigation of 3D mask effects
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Date
2017
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36070.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Erdmann, Andreas
;
Xu, Dongbo
;
Evanschitzky, Peter
;
Philipsen, Vicky
;
Luong, Vu
;
Hendrickx, Eric
Journal
Advanced Optical Technologies
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Views
1904
since deposited on 2021-10-24
1
last month
1
last week
Acq. date: 2025-12-11
Citations