Characterization and mitigation of 3D mask effects

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Authors

Erdmann, Andreas; Xu, Dongbo; Evanschitzky, Peter; Philipsen, Vicky; Luong, Vu; Hendrickx, Eric

ISSN

2192-8584

Issue

3_4

Journal

Advanced Optical Technologies

Volume

6

Title

Characterization and mitigation of 3D mask effects

Publication type

Journal article

Embargo date

9999-12-31

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