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Characterization and mitigation of 3D mask effects

dc.contributor.authorErdmann, Andreas
dc.contributor.authorXu, Dongbo
dc.contributor.authorEvanschitzky, Peter
dc.contributor.authorPhilipsen, Vicky
dc.contributor.authorLuong, Vu
dc.contributor.authorHendrickx, Eric
dc.date.accessioned2021-10-24T04:36:35Z
dc.date.available2021-10-24T04:36:35Z
dc.date.issued2017
dc.identifier.issn2192-8584
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28310
dc.sourceIIOimport
dc.titleCharacterization and mitigation of 3D mask effects
dc.typeJournal article
dc.contributor.imecauthorXu, Dongbo
dc.contributor.imecauthorPhilipsen, Vicky
dc.contributor.imecauthorLuong, Vu
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.orcidimecXu, Dongbo::0000-0003-1159-2315
dc.contributor.orcidimecPhilipsen, Vicky::0000-0002-2959-432X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage187
dc.source.endpage202
dc.source.journalAdvanced Optical Technologies
dc.source.issue3_4
dc.source.volume6
dc.identifier.urlhttps://www.degruyter.com/view/j/aot.2017.6.issue-3-4/aot-2017-0019/aot-2017-0019.xml
imec.availabilityPublished - open access


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