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Atom probe tomography for advanced semiconductor technology research

dc.contributor.authorFleischmann, Claudia
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorArnoldi, Laurent
dc.contributor.authorMorris, Richard
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-24T04:44:36Z
dc.date.available2021-10-24T04:44:36Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28337
dc.sourceIIOimport
dc.titleAtom probe tomography for advanced semiconductor technology research
dc.typeMeeting abstract
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.source.peerreviewno
dc.source.beginpageS10 - P.7
dc.source.conferenceE-MRS Spring Meeting Symposium S: Analytical Techniques for Precise Characterization of Nano Materials
dc.source.conferencedate22/05/2017
dc.source.conferencelocationStrasbourg France
dc.identifier.urlhttps://www.european-mrs.com/sites/default/files/pdf/conference_program.pdf
imec.availabilityPublished - imec
imec.internalnotesALTECH Poster session


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