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ToF-SIMS - SPM combined analysis for real 3D depth profiling of heterogeneous microelectronic structures

dc.contributor.authorFranquet, Alexis
dc.contributor.authorBarnes, Jean-Paul
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorMoreno Villavicencio, M.A.
dc.contributor.authorChevalier, N.
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-24T04:49:53Z
dc.date.available2021-10-24T04:49:53Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28353
dc.sourceIIOimport
dc.titleToF-SIMS - SPM combined analysis for real 3D depth profiling of heterogeneous microelectronic structures
dc.typeMeeting abstract
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage343
dc.source.conference21st International Conference on Secondary Ion Mass Spectrometry - SIMS
dc.source.conferencedate10/09/2017
dc.source.conferencelocationKrakow Poland
dc.identifier.urlhttp://sims.confer.uj.edu.pl/resources/Book_of_Abstracts_A4_v1.pdf
imec.availabilityPublished - open access
imec.internalnotesposter (SN2-Thu-P37)


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