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Novel thin-film solid-composite electrolyte for 3D lithium-ion microbatteries by combining molecular and atomic layer deposition

dc.contributor.authorGandrud, Knut Bjarne
dc.contributor.authorHollevoet, Simon
dc.contributor.authorVan de Kerckhove, Kevin
dc.contributor.authorPut, Brecht
dc.contributor.authorCreatore, Adriana
dc.contributor.authorKessels, W.M.M.
dc.contributor.authorVereecken, Philippe
dc.date.accessioned2021-10-24T04:53:25Z
dc.date.available2021-10-24T04:53:25Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28364
dc.sourceIIOimport
dc.titleNovel thin-film solid-composite electrolyte for 3D lithium-ion microbatteries by combining molecular and atomic layer deposition
dc.typeProceedings paper
dc.contributor.imecauthorHollevoet, Simon
dc.contributor.imecauthorPut, Brecht
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.source.peerreviewyes
dc.source.conferenceEuropean Congress and Exhibition on Advanced Materials and Processes - EUROMAT
dc.source.conferencedate17/09/2017
dc.source.conferencelocationThessaloniki Greece
dc.identifier.urlhttp://euromat2017.fems.eu/articlefiles/Final_EUROMAT2017_Web.pdf
imec.availabilityPublished - imec


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