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Optimisation of bottom-ARC processes with respect to CD control

dc.contributor.authorOp de Beeck, Maaike
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorJaenen, Patrick
dc.contributor.authorZhang, Fenghong
dc.contributor.authorDelvaux, Christie
dc.contributor.authorVan Puyenbroeck, Ilse
dc.contributor.authorRonse, Kurt
dc.contributor.authorLamb, J. E.
dc.contributor.authorvan der Hilst, J. B. C.
dc.date.accessioned2021-10-01T08:38:05Z
dc.date.available2021-10-01T08:38:05Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2842
dc.sourceIIOimport
dc.titleOptimisation of bottom-ARC processes with respect to CD control
dc.typeJournal article
dc.contributor.imecauthorOp de Beeck, Maaike
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.imecauthorJaenen, Patrick
dc.contributor.imecauthorDelvaux, Christie
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecOp de Beeck, Maaike::0000-0002-2700-6432
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage205
dc.source.endpage210
dc.source.journalFuture Fab International
dc.source.issue5
imec.availabilityPublished - open access


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