Optimisation of bottom-ARC processes with respect to CD control

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Author(s)

Op de Beeck, Maaike

;

Vandenberghe, Geert

;

Jaenen, Patrick

;

Zhang, Fenghong

;

Delvaux, Christie

;

Van Puyenbroeck, Ilse

;

;

;

van der Hilst, J. B. C.

Journal

Future Fab International

Metrics

1947 since deposited on 2021-10-01

Acq. date: 2025-10-25