Publication:

Optimisation of bottom-ARC processes with respect to CD control

Date

1998

Journal article

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Files

2446.pdf 1.41 MB

Author(s)

Op de Beeck, Maaike

;

Vandenberghe, Geert

;

Jaenen, Patrick

;

Zhang, Fenghong

;

Delvaux, Christie

;

Van Puyenbroeck, Ilse

;

;

;

van der Hilst, J. B. C.

Journal

Future Fab International

Metrics

1952 since deposited on 2021-10-01

2last month

Acq. date: 2026-01-07