Publication:
Optimisation of bottom-ARC processes with respect to CD control
Date
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0009-0001-2424-1322 | |
| cris.virtual.orcid | 0000-0003-0803-4267 | |
| cris.virtual.orcid | 0000-0002-2700-6432 | |
| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtualsource.department | 39296602-be4d-4e18-afa8-ee84a98173fd | |
| cris.virtualsource.department | b4f8c238-ae6a-4a36-b09f-6a93bec3afa5 | |
| cris.virtualsource.department | 987ea135-86ab-40b5-a86e-f94391ccf5fe | |
| cris.virtualsource.department | b2ac8fb4-ba0e-4aa1-8776-9caf999b8f02 | |
| cris.virtualsource.department | 80bbdec8-1977-4397-9fc1-2cc60d2101bf | |
| cris.virtualsource.orcid | 39296602-be4d-4e18-afa8-ee84a98173fd | |
| cris.virtualsource.orcid | b4f8c238-ae6a-4a36-b09f-6a93bec3afa5 | |
| cris.virtualsource.orcid | 987ea135-86ab-40b5-a86e-f94391ccf5fe | |
| cris.virtualsource.orcid | b2ac8fb4-ba0e-4aa1-8776-9caf999b8f02 | |
| cris.virtualsource.orcid | 80bbdec8-1977-4397-9fc1-2cc60d2101bf | |
| dc.contributor.author | Op de Beeck, Maaike | |
| dc.contributor.author | Vandenberghe, Geert | |
| dc.contributor.author | Jaenen, Patrick | |
| dc.contributor.author | Zhang, Fenghong | |
| dc.contributor.author | Delvaux, Christie | |
| dc.contributor.author | Van Puyenbroeck, Ilse | |
| dc.contributor.author | Ronse, Kurt | |
| dc.contributor.author | Lamb, J. E. | |
| dc.contributor.author | van der Hilst, J. B. C. | |
| dc.contributor.imecauthor | Op de Beeck, Maaike | |
| dc.contributor.imecauthor | Vandenberghe, Geert | |
| dc.contributor.imecauthor | Jaenen, Patrick | |
| dc.contributor.imecauthor | Delvaux, Christie | |
| dc.contributor.imecauthor | Ronse, Kurt | |
| dc.contributor.orcidimec | Op de Beeck, Maaike::0000-0002-2700-6432 | |
| dc.date.accessioned | 2021-10-01T08:38:05Z | |
| dc.date.available | 2021-10-01T08:38:05Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2842 | |
| dc.source.beginpage | 205 | |
| dc.source.endpage | 210 | |
| dc.source.issue | 5 | |
| dc.source.journal | Future Fab International | |
| dc.title | Optimisation of bottom-ARC processes with respect to CD control | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |