Publication:

Optimisation of bottom-ARC processes with respect to CD control

Date

1998
Journal article
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-0803-4267
cris.virtualsource.department987ea135-86ab-40b5-a86e-f94391ccf5fe
cris.virtualsource.orcid987ea135-86ab-40b5-a86e-f94391ccf5fe
dc.contributor.authorOp de Beeck, Maaike
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorJaenen, Patrick
dc.contributor.authorZhang, Fenghong
dc.contributor.authorDelvaux, Christie
dc.contributor.authorVan Puyenbroeck, Ilse
dc.contributor.authorRonse, Kurt
dc.contributor.authorLamb, J. E.
dc.contributor.authorvan der Hilst, J. B. C.
dc.contributor.imecauthorOp de Beeck, Maaike
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.imecauthorJaenen, Patrick
dc.contributor.imecauthorDelvaux, Christie
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecOp de Beeck, Maaike::0000-0002-2700-6432
dc.date.accessioned2021-10-01T08:38:05Z
dc.date.available2021-10-01T08:38:05Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2842
dc.source.beginpage205
dc.source.endpage210
dc.source.issue5
dc.source.journalFuture Fab International
dc.title

Optimisation of bottom-ARC processes with respect to CD control

dc.typeJournal article
dspace.entity.typePublication
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