Authors

Haouari, Rachid; Jansen, Roelof; Rochus, Veronique; Figeys, Bruno; Lagae, Liesbet; Rottenberg, Xavier

Conference

Tech Connect World

Title

Design considerations: From Micro-Opto-Mechanical Pressure Sensor (MOMPS) to Micro-Opto-Mechanical Microphones (MOMM)

Publication type

Proceedings paper