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CMOS-compatible ALD zinc oxide coating for on-chip second-order nonlinear optical functionalities

dc.contributor.authorHermans, Artur
dc.contributor.authorVan Daele, Michiel
dc.contributor.authorKieninger, Clemens
dc.contributor.authorDendooven, Jolien
dc.contributor.authorClemmen, Stephane
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorKoos, Christian
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-24T05:37:27Z
dc.date.available2021-10-24T05:37:27Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28489
dc.sourceIIOimport
dc.titleCMOS-compatible ALD zinc oxide coating for on-chip second-order nonlinear optical functionalities
dc.typeProceedings paper
dc.contributor.imecauthorHermans, Artur
dc.contributor.imecauthorClemmen, Stephane
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecHermans, Artur::0000-0003-2911-7125
dc.contributor.orcidimecClemmen, Stephane::0000-0003-0192-4662
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpagepaper SM3K.3
dc.source.conferenceConference on Lasers and Electro-Optics - CLEO
dc.source.conferencedate13/05/2017
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttps://doi.org/10.1364/CLEO_SI.2017.SM3K.3
imec.availabilityPublished - open access
imec.internalnotesISBN 978-1-943580-27-9


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