Authors

Horiguchi, Naoto; Ragnarsson, Lars-Ake; Mertens, Hans; Arimura, Hiroaki; Ritzenthaler, Romain; Franco, Jacopo; Schram, Tom; Dekkers, Harold; Barla, Kathy; Mocuta, Dan

Conference

International Workshop on Dielectric Thin Films

Title

Challenges and progresses in high-k metal gate for Silicon-based advanced CMOS transistor architecture

Publication type

Proceedings paper