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Plasma-assisted and thermal atomic layer deposition of ALD of electrochemically active Li2CO3 for Li-ion batteries

dc.contributor.authorHornsveld, Norah
dc.contributor.authorPut, Brecht
dc.contributor.authorKessels, W.M.M.
dc.contributor.authorVereecken, Philippe
dc.contributor.authorCreatore, M
dc.date.accessioned2021-10-24T05:50:48Z
dc.date.available2021-10-24T05:50:48Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28524
dc.sourceIIOimport
dc.titlePlasma-assisted and thermal atomic layer deposition of ALD of electrochemically active Li2CO3 for Li-ion batteries
dc.typeMeeting abstract
dc.contributor.imecauthorPut, Brecht
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.source.peerreviewno
dc.source.beginpageNM05.07.24
dc.source.conferenceMRS Fall Meeting Symposium NM05: Nanomaterials, Nanoparticles and Nanostructures Produced by Plasmas
dc.source.conferencedate26/11/2017
dc.source.conferencelocationBoston, MA USA
dc.identifier.urlhttp://www.mrs.org/technical-programs/programs_abstracts/nm05_07_24_23
imec.availabilityPublished - imec


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